SEMI E56 : 2017
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS
Published date
12-01-2013
Specifies a standardized method to quantify the accuracy, linearity, repeatability, short-term reproducibility, hysteresis, and dead band of a thermal mass flow controller (MFC).
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