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SEMI M69 : 2007

SEMI M69 : 2007

Current

Current

The latest, up-to-date edition.

PRACTICE FOR DETERMINING WAFER NEAR-EDGE GEOMETRY USING ROLL-OFF AMOUNT, ROA

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes selection of the point at which the ROA is determined and the reference line to be utilized for this determination.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
SEMI M20 : 2015 PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM

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