Name: SEMI MF525:2012(R2023)
Brand: SEMI
Price: 284.63 AUD

Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

Available format(s)

Hardcopy

Language(s)

English

Published date

01-10-2023

Publisher

Semiconductor Equipment & Materials Institute

This Test Method covers the measurement of the resistivity of a silicon substrate of known orientation and type, or of a uniform silicon epitaxial layer of known orientation and type that is deposited on a substrate of the same or opposite type.

DocumentType	Test Method
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI MF525:2012(R2018)

SEMI MF374:2012(R2023)	Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure
SEMI MF84:2012(R2023)	Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe
SEMI MF1392:2007(R2023)	Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe