SEMI PV42 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR IN-LINE MEASUREMENT OF WAVINESS OF PV SILICON WAFERS BY A LIGHT SECTIONING TECHNIQUE USING MULTIPLE LINE SEGMENTS
05-10-2020
07-02-2013
Describes the maximum peak-to-valley of waviness of multi or single crystal Si wafers that typically runs across the entire wafer surface and along the wire direction.
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