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SEMI
SEMI S12 : 2011

SEMI S12 : 2011

Current

Current

The latest, up-to-date edition.

ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up guidance for decontaminating manufacturing equipment (ME) and parts that were or may have been exposed to hazardous materials and which are intended for further productive use.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003) E = This standard was editorially modified in November 2015 to correct editorial errors. (12/2015)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E35 : 2012 GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI S16 : 2007(R2012) GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE
SEMI S13 : 2013 ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT

SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI S16 : 2007(R2012) GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE

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