BS EN ISO 18452:2016
Current
The latest, up-to-date edition.
Fine ceramics (advanced ceramics, advanced technical ceramics). Determination of thickness of ceramic films by contact-probe profilometer
Hardcopy , PDF
English
30-04-2016
1 Scope
2 Normative references
3 Terms and definitions
4 Principle of measurement
5 Test environment
6 Apparatus
7 Test pieces
8 Procedure
9 Calculation
10 Limits to step height
11 Test report
Annex A (informative) - Effect of amplification factor
and levelling error on measured layer thickness
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