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BS ISO 11952:2019

BS ISO 11952:2019

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Current

The latest, up-to-date edition.

Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-05-2019

Publisher

British Standards Institution

This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level.

1 This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument\'s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IECGuide98-3 , to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.

Committee
CII/60
DocumentType
Standard
ISBN
9780580882968
Pages
72
PublisherName
British Standards Institution
Status
Current

Standards Relationship
ISO 11952:2019 Identical

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Hardcopy - English
PDF - English
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