BS ISO 18116:2005

1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General requirements
6 Visual inspection of the specimen
7 Specimen considerations
   7.1 History
   7.2 Information sought
   7.3 Specimens previously examined by other analytical
         techniques
8 Sources of specimen contamination
   8.1 Tools, gloves, mounts and similar materials
   8.2 Exposure to gases
   8.3 Exposure to instrumental vacuum
   8.4 Exposure to electrons, ions, and X-rays
   8.5 Contamination of the analytical chamber
9 Specimen storage and transfer
   9.1 Storage time
   9.2 Storage containers
   9.3 Temperature and humidity
   9.4 Specimen transfer
10 Specimen mounting procedures
   10.1 General procedures
   10.2 Powders and particles
   10.3 Wires, fibres and filaments
   10.4 Pedestal mounting
   10.5 Reduction of thermal damage during analysis
11 Methods for reducing specimen charging
   11.1 General considerations
   11.2 Conductive mask, grid, wrap or coating
   11.3 Flood gun
   11.4 Electron and ion beams
12 Specimen preparation techniques
   12.1 General considerations
   12.2 Mechanical separation
   12.3 Thinning versus removal
   12.4 Removal of the substrate
   12.5 Sectioning techniques
   12.6 Growth of overlayers
   12.7 Solvents
   12.8 Chemical etching
   12.9 Ion sputtering
   12.10 Plasma etching
   12.11 Heating
   12.12 Ultraviolet radiation
13 Fracturing, cleaving and scribing
   13.1 Fracture
   13.2 Cleaving
   13.3 Scribing
14 Special specimen-handling techniques
   14.1 Prepumping of gassy specimens
   14.2 Viscous liquids
   14.3 Solute residue
Bibliography