EN ISO 25178-606:2015
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The latest, up-to-date edition.
Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015)
Published date
17-06-2015
Publisher
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Description of the influence quantities
Annex A (informative) - Components of a focus variation
microscope
Annex B (informative) - Relation to the GPS matrix model
Bibliography
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