I.S. EN ISO 14644-10:2022
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Hardcopy , PDF
English
07-06-2022
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Testing and grading surface chemical levels
5 Measuring the cleanliness of surfaces for chemical contamination and demonstration of grade level compliance
Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances
Annex B (informative) Parameters influencing testing and interpretation of results
Annex C (informative) Essential considerations for a good cleanliness assessment
Annex D (informative) Methods for testing surface cleanliness for chemical concentration
Annex E (informative) Test record documentation
Bibliography
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