NEN-ISO 11952 : 2019
Current
Current
The latest, up-to-date edition.
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2019
Publisher
NEN-ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level.
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