NEN NPR IEC/TS 62622 : 2012
Current
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The latest, up-to-date edition.
NANOTECHNOLOGIES - DESCRIPTION, MEASUREMENT AND DIMENSIONAL QUALITY PARAMETERS OF ARTIFICIAL GRATINGS
Published date
23-11-2012
Publisher
Defines the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.
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