PREN ISO 14644-10 : DRAFT 2011
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
01-03-2013
12-01-2013
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of surfaces
for chemical contamination and demonstration of
compliance
6 Test record
Annex A (informative) - Conversion between different
unit expressions of surface concentration
for chemical substances
Annex B (informative) - Parameters influencing testing
and interpretation of results
Annex C (informative) - Essential considerations for a
good cleanliness assessment
Annex D (informative) - Methods for testing surface
cleanliness by chemical concentration
Bibliography
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