SEMI D4 : 1994

This specification provides a methodology for referencing rectangular Flat Panel Display Front and Back Plate Substrates in process and inspection operations where the absolute location of substrate and pattern features must be known. In the processing and inspection of substrates for Flat Panel Displays, it is required to find features on the substrate surface. These substrates are conventionally referenced against edge locating (also called "banking") pins. It is desirable to standardize on the location of such pins in relation to each other and to the substrate edges, so that features of interest may be both placed and located consistently. Procedure gives a means of describing both the rotational orientation of substrates and their fixture-related quadrant location.