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SEMI E116.1 : 2007

SEMI E116.1 : 2007

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SECS-2 PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of the Equipment Performance Tracking Standard (EPT) to SECS-II streams, functions, and data definitions. Also applies to all implementations of EPT that use the SECS-II message protocol [SEMI E5].

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2003) Also available in CD-ROM format. (07/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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