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SEMI E125.1 : 2014

SEMI E125.1 : 2014

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies an implementation mapping of the SEMI E125 specification to the SOAP 1.1 protocol. Also provides a description of the XML Schema data types used to support the UML classes defined in SEMI E125, and also describes the WSDL port type and binding definitions used to support the operations defined by the interfaces specified in SEMI E125.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005) Not available separately, Published within the SEMI E125 family of standards. (03/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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