SEMI E54.22 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE GAUGES
05-10-2020
28-07-2013
Defines a network-independent application model comprised of device objects which are common to all Vacuum Pressure Gauges on a semiconductor equipment Sensor/Actuator communications network.
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