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SEMI E63 : 2016

SEMI E63 : 2016

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE

Superseded date

08-03-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E154 : 2014 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
SEMI HB3 : 2016 SPECIFICATION FOR THE MECHANICAL INTERFACE FOR 150 MM HB-LED LOAD PORT
SEMI E92 : 2002E(R2015) SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
SEMI E131 : 2004(R2010) SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M
SEMI S28 : 2011 SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION

SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS

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