SEMI F57 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
05-10-2020
12-01-2013
Defines minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultra pure water (UPW) in UPW distribution systems.
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