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SEMI
SEMI G78 : 1999

SEMI G78 : 1999

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

TEST METHOD FOR COMPARING AUTOMATED WAFER PROBE SYSTEMS UTILIZING PROCESS-SPECIFIC MEASUREMENTS

Withdrawn date

01-10-2011

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the terms and provide a means of comparative, or relative measurement for the automated wafer prober functions: Accuracy, Repeatability and Throughput.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
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