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SEMI S29 : 2012

SEMI S29 : 2012

Current

Current

The latest, up-to-date edition.

GUIDE FOR FLUORINATED GREENHOUSE GAS (F-GHG) EMISSION CHARACTERIZATION AND REDUCTION

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies guidance to characterize fluorinated greenhouse gas (F-GHG) emitted from manufacturing equipment (ME).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (08/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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