Name: SEMI T12.1 : 2004(R2010)
Brand: SEMI

SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps Services and data in Specification of Tracking Jig and Implements into SECS protocol. Also applies to SECS implementation of Jigs and Implements traceability with some interoperability with semiconductor Manufacturing Execution System (MES).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) Not available separately, Published within the SEMI T12 family of standards. (07/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI T12 : 2010	SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS
SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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SEMI T12.1 : 2004(R2010)

SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS

Abstract

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