Name: SEMI T13 : 2004(R2010)
Brand: SEMI

SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies device tracking data transfer between entities in a fab. Some entities may be physical or logical depending on configuration of the fab. Sometimes the transfer is carried out between entities in different companies over such communication media as internet or VPN (Virtual Private Network).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2004) Includes SEMI T13.1 & SEMI T13.2. (07/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI T13.2 : 2004(R2010)	SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING
SEMI T17 :2006(R2018)	SPECIFICATION OF SUBSTRATE TRACEABILITY
SEMI T19 : 2011(R2017)	SPECIFICATION FOR DEVICE MARKING
SEMI T13.1 : 2004(R2010)	SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING

SEMI G84 : 2003	SPECIFICATION FOR STRIP MAP PROTOCOL
SEMI M17 : 2010(R2015)	GUIDE FOR A UNIVERSAL WAFER GRID
SEMI M20 : 2015	PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM
SEMI G81 : 2007(R2015)	SPECIFICATION FOR MAP DATA ITEMS
SEMI E130 : 2017	SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI G85 : JUL 2003	SPECIFICATION FOR MAP DATA FORMAT

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SEMI T13 : 2004(R2010)

SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES

Abstract

General Product Information

Standards Referenced By This Book

Standards Referencing This Book

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