SS-ISO 14644-12 : 2018
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Available format(s)
Hardcopy
Language(s)
English
Published date
27-11-2018
Publisher
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
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