BS ISO 11952 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - DETERMINATION OF GEOMETRIC QUANTITIES USING SPM - CALIBRATION OF MEASURING SYSTEMS

Available format(s)

Hardcopy , PDF

Language(s)

English

Publisher

British Standards Institution

1 Scope
2 Normative references, terms and definitions
3 Symbols
4 Characteristics of scanning probe microscopes
5 Preliminary characterization of the measuring system
6 Calibration
7 Report of calibration results
8 Uncertainties of measurement
9 Report of results (form)
Annex A (informative) - Exemplary superposition of
        disturbing influences in the topography
Annex B (informative) - Sound investigations: Effects
        of a sound proofing hood
Annex C (informative) - Thermal isolation effect of a
        sound proofing hood/measuring cabin
Annex D (informative) - Control parameters and scan
        speed; handling of contaminations
Annex E (informative) - Step height determination:
        comparison histogram and ISO 5436 method
Annex F (normative) - Uncertainty of measurement for
        lateral measurands
Bibliography

BS ISO 11952

Committee	CII/60
DocumentType	Draft
Pages	58
PublisherName	British Standards Institution
Status	Current

ISO 12179:2000	Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO Guide 30:2015	Reference materials Selected terms and definitions
ISO 3274:1996	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015	Microscopes Information provided to the user
ISO 5436-1:2000	Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy
ISO 13095:2014	Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
ISO 11775:2015	Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
ISO Guide 34:2009	General requirements for the competence of reference material producers