SEMI C34 : 2013(R 2019)
Current
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDELINE FOR MIXED ACID ETCHANTS
Available format(s)
Hardcopy
Language(s)
English
Published date
01-12-2013
Specifies requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards.
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