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SEMI MF1708 : 2004

SEMI MF1708 : 2004

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The latest, up-to-date edition.

PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a procedure to consolidate granular polysilicon into a solid rod and then to convert the polysilicon rod into a single crystal by a float-zone technique.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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