SEMI MF1391 : 2007(R2012)

Name: SEMI MF1391 : 2007(R2012)
Brand: SEMI

Superseded

TEST METHOD FOR INTERSTITIAL OXYGEN CONTENT OF SILICON BY INFRARED ABSORPTION WITH SHORT BASELINE

Superseded date

11-16-2023

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Intended to be used as a method for determining the interstitial oxygen content of silicon slices.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2003) Also available in CD-ROM. (10/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF1391:2007(R2023)

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