Name: SEMI C29 : 2010
Brand: SEMI

SPECIFICATIONS AND GUIDE FOR 4.9% HYDROFLUORIC ACID (10:1 V/V)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies requirements for 4.9% hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C12-3, SEMI C7.4 & SEMI C8-4. (03/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
SupersededBy	SEMI C29:2018
Supersedes	SEMI C8.4 : 1998 SEMI C7.4 : 1993 SEMI C12-3 : 1996

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