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SEMI MF1723 : 2004

SEMI MF1723 : 2004

Current

Current

The latest, up-to-date edition.

PRACTICE FOR EVALUATION OF POLYCRYSTALLINE SILICON RODS BY FLOAT-ZONE CRYSTAL GROWTH AND SPECTROSCOPY

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the sampling system and float-zone crystal growth procedures used to prepare polysilicon core samples for analysis of acceptor, donor, and carbon content.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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