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SEMI MF397 : 2006(R2011)

SEMI MF397 : 2006(R2011)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TEST METHOD FOR RESISTIVITY OF SILICON BARS USING A TWO-POINT PROBE

Superseded date

11-16-2023

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Covers the measurement of the resistivity of single-crystal bars having cross sections that are uniform in area and square, rectangular or round in shape, and having resistivity between 0.0009 and 3000 cm.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005) Also available in CD-ROM. Also numbered as DIN 50430. (11/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI PV1 : 2011(R2018) TEST METHOD FOR MEASURING TRACE ELEMENTS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY HIGH-MASS RESOLUTION GLOW DISCHARGE MASS SPECTROMETRY
SEMI MF1723 : 2004 PRACTICE FOR EVALUATION OF POLYCRYSTALLINE SILICON RODS BY FLOAT-ZONE CRYSTAL GROWTH AND SPECTROSCOPY
SEMI MF43 : 2016 TEST METHOD FOR RESISTIVITY OF SEMICONDUCTOR MATERIALS
SEMI PV49 : 2013(R2018) TEST METHOD FOR THE MEASUREMENT OF ELEMENTAL IMPURITY CONCENTRATIONS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY BULK DIGESTION, INDUCTIVELY COUPLED-PLASMA MASS SPECTROMETRY
SEMI PV17 : OCT 2012 SPECIFICATION FOR VIRGIN SILICON FEEDSTOCK MATERIALS FOR PHOTOVOLTAIC APPLICATIONS

SEMI C31 : 2015 SPECIFICATION FOR METHANOL
SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
SEMI MF42 : 2016 TEST METHOD FOR CONDUCTIVITY TYPE OF EXTRINSIC SEMICONDUCTING MATERIALS
SEMI C28 : 2011 SPECIFICATIONS FOR HYDROFLUORIC ACID
SEMI C19 : 2014 SPECIFICATION FOR ACETONE

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