SEMI 3D10 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE TO DESCRIBING MATERIALS PROPERTIES FOR INTERMEDIATE WAFERS FOR USE IN A 300 MM 3DS-IC WAFER STACK
10-05-2020
08-26-2014
Pertains to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure processed wafers to be used in a 3DS-IC process.
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