SEMI E32 : 1997

The main document addresses the communications needs of semiconductor manufacturing facilities in respect of material movement. Covering automated material movement on the semiconductor factory floor, transporting objects/material from one storage or processing location to another. It defines the concept of material movement; equipment behavior in relation to material movement and messaging services needed to complete the task. The subordinate document SEMI E32.1 "SECS-II Support for Material Movement" contains information for implementing the Material Movement Management Standard E32 using the SEMI E5 SECS-II communications protocol.