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SEMI E81 : 2000(R2007)

SEMI E81 : 2000(R2007)

Current

Current

The latest, up-to-date edition.

PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the Manufacturing Execution Systems (MES) domain that is the subject of the CIM Framework and to provide a reference for concepts that are common to the set of documents that specify the CIM Framework. Also defines the structure, relationships and interworkings of the components that together comprise the CIM Framework.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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