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SEMI E133 : 2018

SEMI E133 : 2018

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE

Superseded date

04-12-2024

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies PCS capabilities, functional groups (FGs), and FG interfaces.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004) Includes SEMI E133.1. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E134 : 2014 SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E148 : 2009(R2014) SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT
SEMI E81 : 2000(R2007) PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE
SEMI E125 : 2014 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

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