SEMI E102 : 2000(R2006)
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT
Published date
01-12-2013
Provides specification Factory Operations, Material Transport and Storage, Production Machine, and Equipment Tracking and Maintenance components by ordering, in time, jobs that process material on equipment, move material, and maintain equipment.
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