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SEMI E96 : 2001(R2007)

Current

Current

The latest, up-to-date edition.

GUIDE FOR CIM FRAMEWORK TECHNICAL ARCHITECTURE

Published date

01-12-2013

Describes technical architecture choices that enable application components to cooperate in a Computer Integrated Manufacturing (CIM) environment and reduce the effort required to integrate those components into a working solution.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E81 : 2000(R2007) PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE

SEMI E81 : 2000(R2007) PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE

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