Name: SEMI E64 : 2005(R2012)
Brand: SEMI

SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes a standard location on SEMI E15.1 compliant tools and requirements to be used for installing a docking interface for carrier transport carts.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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