SEMI G82 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR 300 MM LOAD PORT FOR FRAME CASSETTES IN BACKEND PROCESS
Superseded date
02-08-2021
Published date
01-12-2013
Specifies dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment.
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