SEMI G82 : 2015(R2020)
Current
Current
The latest, up-to-date edition.
Specification for 300 mm Load Port for Frame Cassettes in Backend Process
Available format(s)
Hardcopy
Language(s)
English
Published date
12-01-2020
This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment.
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