ASTM F 522 : 1994
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
Superseded date
12-31-1998
Published date
12-31-2010
CONTAINED IN VOL 10.05 1997 Describes non-destructive determination of stacking fault density in epitaxial layers of silicon. Precision at densities in excess of 15 000 cm to the minus 2 is less than that at lower densities.
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