ASTM F 154 : 2002
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
01-10-2001
CONTAINED IN VOL. 10.05, 2001 Lists, illustrates, and defines various characters, features, and contaminants seen on highly specular silicon, and gives recommended methods for observing these surface defects. Defects and common synonyms are arranged alphabetically using common name and most probable origins. Describes surfaces after mechanical and chemical polishing, and polished surfaces examined after epitaxial deposition.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.