DIN 50434:1986-02
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY; DETECTION OF CRYSTAL DEFECTS IN MONOCRYSTALLINE SILICON USING ETCHING TECHNIQUES ON (111) AND (100) SURFACES
Hardcopy , PDF
07-01-2007
English
01-12-2013
The method specified is used to detect crystal defects as described in clause 2 in monocrystalline silicon samples, preferably in slice form, with polished or polish-etched surfaces oriented in the {111} and {100} planes by defect etching. The method is especially suitable for determining the density and distribution of dislocations. It is suitable for n-type and p-type doped silicon with resistivities down to 0,005 omega cm for dislocation densities between 100 and 100000 cm-[2].
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