EN 60749-28:2017
Current
The latest, up-to-date edition.
Semiconductor devices - Mechanical and climatic test methods - Part 28: Electrostatic discharge (ESD) sensitivity testing - Charged device model (CDM) - device level
06-30-2017
FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Required equipment
5 Periodic tester qualification, waveform records, and
waveform verification requirements
6 CDM ESD testing requirements and procedures
7 CDM classification criteria
Annex A (normative) - Verification module (metal disc)
specifications and cleaning guidelines for verification
modules and testers
Annex B (normative) - Capacitance measurement of verification
modules (metal discs) sitting on a tester field plate
dielectric
Annex C (informative) - CDM test hardware and metrology
improvements
Annex D (informative) - CDM tester electrical schematic
Annex E (informative) - Sample oscilloscope setup and waveform
Annex F (informative) - Field-induced CDM tester discharge
procedures
Annex G (informative) - Waveform verification procedures
Annex H (informative) - Determining the appropriate charge delay
for full charging of a large module or device
Annex I (informative) - Electrostatic discharge (ESD) sensitivity
testing direct contact charged device model (DC-CDM)
Bibliography
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