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CEN
EN ISO 14644-10:2013

EN ISO 14644-10:2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

Superseded date

06-01-2022

Published date

03-06-2013

Publisher

Comite Europeen de Normalisation

Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
  surfaces for chemical contamination and
  demonstration of compliance
Annex A (informative) - Conversion between different
        unit expressions of surface concentration for
        chemical substances
Annex B (informative) - Parameters influencing testing
        and interpretation of results
Annex C (informative) - Essential considerations for
        a good cleanliness assessment
Annex D (informative) - Methods for testing surface
        cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Committee
CEN/TC 243
DevelopmentNote
Supersedes PREN ISO 14644-10. (03/2013)
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Superseded

VDI 2083 Blatt 9.2:2017-01 Cleanroom technology - Consumables in the cleanroom
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes

SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 17052:2007 Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 18115-1:2013 Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 18116:2005 Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 10312:1995 Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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