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NEN EN ISO 14644-8 : 2013

NEN EN ISO 14644-8 : 2013

Current

Current

The latest, up-to-date edition.

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ACC)

Published date

01-12-2013

Publisher

Netherlands Standards

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) Parameters for consideration
Annex B (informative) Typical contaminants
Annex C (informative) Typical methods of measurement
Annex D (informative) Consideration of specific
                      requirements for separative devices
Bibliography

Describes the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

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