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UNE-EN ISO 14644-8:2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)

Available format(s)

Hardcopy , PDF

Superseded date

02-08-2023

Language(s)

Spanish, Castilian, English

Published date

07-09-2014

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) Parameters for consideration
Annex B (informative) Typical contaminants
Annex C (informative) Typical methods of measurement
Annex D (informative) Consideration of specific
                      requirements for separative devices
Bibliography

This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

Committee
CTN 100
DocumentType
Standard
Pages
30
PublisherName
Asociacion Espanola de Normalizacion
Status
Superseded
SupersededBy
Supersedes

UNE 171340:2012 Validation and evaluation of controlled environment rooms in hospitals

SEMI E45 : NOV 2001(R2007) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
IEST G CC035.1 : 2009 DESIGN CONSIDERATIONS FOR AIRBORNE MOLECULAR CONTAMINATION FILTRATION SYSTEMS IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
SEMI F21 : 2016 CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS
SEMI E108 : 2007 TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY

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