PREN ISO 25178-603 : DRAFT 2009
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS
10-01-2013
01-12-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Metrological characteristics of the instrument
4 Description of the metrological characteristics
4.1 General
4.2 Overview
4.3 Metrological characteristics
Annex A (informative) - Components of a phase shifting
interferometric (PSI) microscope
Annex B (informative) - Phase shifting interferometric (PSI)
microscope - Theory of operation
Annex C (informative) - Errors and corrections for phase
shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS matrix model
Bibliography
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