Name: SEMI D44 : 2006E
Brand: SEMI

SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the datum line that specifies the position of the FPD manufacturing equipment, the position of the substrate, and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (07/2006) E = This standard was editorially modified to correct an error. (03/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI D51 : 2009	SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION
SEMI D49 : 2007	SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION
SEMI D48 : NOV 2007	SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL