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SEMI D51 : 2009

SEMI D51 : 2009

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The latest, up-to-date edition.

SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the handshake methods for transferring single substrates, which are currently different at each FPD fab. It is expected that this will result in improved efficiency in the design, production and installation of equipment, as well as in cost reduction.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM format. (02/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D54 : 2009E SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD)

SEMI D44 : 2006E SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL

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